Učni načrt predmeta

Predmet:

Vakuumistika

Course:

Vacuum Science and Technology

Študijski program in stopnja / Study programme and level	Študijska smer / Study field	Letnik / Academic year	Semester / Semester
Nanoznanosti in nanotehnologije, 3. stopnja	/	1	1
Nanosciences and Nanotechnologies, 3rd cycle	/	1	1

Vrsta predmeta / Course type

Izbirni / Elective

Univerzitetna koda predmeta / University course code:

NANO3-839

Predavanja Lectures	Seminar Seminar	Vaje Tutorial	Klinične vaje work	Druge oblike študija	Samost. delo Individ. work	ECTS
15	15			15	105	5

*Navedena porazdelitev ur velja, če je vpisanih vsaj 15 študentov. Drugače se obseg izvedbe kontaktnih ur sorazmerno zmanjša in prenese v samostojno delo. / This distribution of hours is valid if at least 15 students are enrolled. Otherwise the contact hours are linearly reduced and transfered to individual work.

Nosilec predmeta / Course leader:

izr. prof. dr. Janez Kovač

Sodelavci / Lecturers:

Jeziki / Languages:

Predavanja / Lectures:

Slovenski ali angleški / Slovene or English

Vaje / Tutorial:

Angleški / English

Pogoji za vključitev v delo oz. za opravljanje študijskih obveznosti:

Prerequisits:

Vsebina:

Content (Syllabus outline):

Fizikalne osnove, izrazoslovje, merilne enote in definicije v vakuumski tehniki in tehnologiji

Priprava vakuuma: črpanje plinov, vakuumske črpalke, hitrost črpanja, vrste pretokov plinov

Fizikalno-kemijski procesi na površinah materialov: desorpcija, adsorpcija, sorpcija, segregacija, difuzija, permeacija, razplinjanje materialov

Meritve vakuuma od 1000 mbar do 10-12 mbar, izbira merilnikov tlaka, principi meritev, analiza preostalih plinov z masno spektrometrijo, detekcija puščanja, hitrost puščanja

Vakuumske komponente, sistemi in materiali:
načrtovanje vakuumskega sistema glede na
področje vakuuma; izbira materialov in
komponent

Metode za analizo površin, ki delujejo v ultravisokem vakuumu: rentgenska fotoelektronska spektroskopija (XPS), masna spektrometrija sekundarnih ionov (SIMS), spektroskopija Augerjevih elektronov (AES): fizikalni principi, analizna globina, lateralna ločljivost, občutljivost metod, kvantitativna obdelava podatkov, profilna analiza tankih plasti

Nizkotlačne in atmosferske plazme: termodinamsko neravnovesno stanje plinov,
uporaba plazme za čiščenje, aktivacijo,
funkcionalizacijo in selektivno jedkanje površin

Vakuumska tehnika v inženirstvu površin za
izboljšanje lastnosti površin: priprava in obdelava
površin, nanos PVD in CVD prevlek

Vakuumske tehnologije v metalurgiji, kemijski,
farmacevtski, prehrambni industriji, elektroniki in
elektrooptiki

Introduction in vacuum physics, basic terms, units of measurement, definitions in vacuum techniques and technology

Vacuum generation: pumping of gases, vacuum pumps, pumping speed, types of gas flow

Physical-chemical processes at the surfaces of materials: desorption, absorption, sorption, segregation, diffusion, permeation, outgassing

Vacuum measurement in the range from 1000 mbar to 10-12 mbar, selection of vacuum gauges, analysis of residual gases using mass spectrometry, detection of leaks, leak rate.

Vacuum components, systems and materials, design of vacuum systems for different ranges, selection of materials and components

Surface analytical techniques based on ultrahigh
vacuum: X-ray photoelectron spectroscopy (XPS),
Secondary ion mass spectroscopy (SIMS), Auger
electron spectroscopy (AES), physical principles,
sampling depth, spatial resolution, sensitivity,
quantification, data processing, depth profiling of
thin films

Low pressure and atmospheric plasmas: thermodynamically non-equilibrium state of gas,
applications for cleaning, surface activation, surface functionalization and selective etching

Vacuum techniques in surface engineering: to
improve performance of materials: surface
preparation and treatment, deposition of PVD and CVD coatings

Vacuum technologies in metallurgy, pharmaceutic and food industry, electronics and optoelectronics

Temeljna literatura in viri / Readings:

Izbrana poglavja iz naslednjih knjig in virov: / Selected chapters from the following books:
-  V. Nemanič (urednik): Vakuumska znanost in tehnika, Društvo za vakuumsko tehniko Slovenije,
Ljubljana, 2003.
- Pedagoški material pri Mednarodni zvezi za vakuumsko znanost, tehniko in aplikacije – IUVSTA:
http://www.iuvsta-us.org/iuvsta2/index.php?id=2072, urednik M. Mozetič, 2013.
- Vacuum Technology Book, Volume II, Pfeiffer Vacuum GmbH, 2018, https://www.pfeiffervacuum.com/en/info-center/vacuum-technology-book/.
- J. Gasperič: Nasveti za uporabnike vakuumske tehnike, Društvo za vakuumsko tehniko Slovenije,
Ljubljana, 2002.
- P. Panjan, M. Čekada, Zaščita orodij s trdimi PVD-prevlekami, Institut »Jožef Stefan«, 2005
- J. M. Lafferty (editor): Foundations of Vacuum Science and Technique, John Wiley and Sons, Inc., New
York, (1998).
- M. Wutz, H. Adam, W. Walcher: Theory and Practice of Vacuum Technology, Third Edition Friedr.
Vieweg and Son. Braunschweig, (1989).
- S. Hofmann, Auger- and X-Ray Photoelectron Spectroscopy in Material Science, Springer-Verlag Berlin
Heidelberg, 2013.
- D. Briggs, J. T. Grant (eds.): Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy, IM
Publications, Chichester, 2003.
- M. Thomas, K. L. Mittal (eds.), Atmospheric Pressure Plasma Treatment of Polymers, John Wiley and
Sons and Scrivener Publishing LLC, Salem, Massachusetts, 2013.
- Marija Gorjanc, Miran Mozetič: Modification of fibrous polymers by gaseous plasma: principles, 
techniques and applications. Saarbrücken: LAP Lambert Academic Publishing, 2014.

Cilji in kompetence:

Objectives and competences:

Predvideni študijski rezultati:

Intendeded learning outcomes:

Metode poučevanja in učenja:

Learning and teaching methods:

Načini ocenjevanja:

Delež v % / Weight in %

Assesment:

Ustni izpit

50 %

Oral exam

Seminarska naloga

25 %

Seminar work

Zagovor seminarske naloge, pri katerem dokaže osvojitev vseh študijskih izidov z vsaj po enim konkretnim primerom

25 %

Defense of the seminar work where the student demonstrates the achievement of all learning outcomes with at least one specific case for each outcome

Reference nosilca / Lecturer's references:

1.	G. Žerjav, M.S. Arshad, P. Djinović, I. Junkar, J. Kovač, J. Zavašnik, A. Pintar, Improved electron-hole separation and migration in anatase TiO2 nanorod/reduced graphene oxide composites and their influence on photocatalytic performance, Nanoscale, 2017, vol. 9, iss. 13, str. 4578-4592.
2.	U. Tiringer, J. Kovač, I. Milošev, Effects of mechanical and chemical pre-treatments on the morphology and composition of surfaces of aluminium alloys 7075-T6 and 2024-T3, Corrosion science, 2017, vol. 119, str. 46-59.
3.	H. Puliyalil, G. Filipič, J. Kovač, M. Mozetič, S. Thomas, U. Cvelbar, Tackling chemical etching and its mechanisms of polyphenolic composites in various reactive low temperature plasmas, RSC advances, 2016, vol. 6, iss. 97, str. 95120-95128.
4.	A.Vesel, A. Drenik, K. Eleršič, M. Mozetič, J. Kovač, T. Gyergyek, J. Stöckel, J. Varju, R. Panek, M. Balat- Pichelin, Oxidation of Inconel 625 superalloy upon treatment with oxygen or hydrogen plasma at high temperature, Applied Surface Science, vol. 305, 674-682.
5.	Miran Mozetič et al., Recent advances in vacuum sciences and applications, J. Phys. D: Appl. Phys. 47 (2014) 153001.