DEFENCE OF THE DOCTORAL DISSERTATION BY NASTJA MAHNE

Defence of the Doctoral Dissertation by Nastja Mahne

IPS invites you to the Defence of the Doctoral Dissertation by Nastja Mahne titled: Spatial and energy distributions of sputtered atoms in thin film deposition techniques. The defence will take place on Thursday, 18 April 2024, at 12:30 p.m. at the IPS Lecture Room, Jamova 39, 1000 Ljubljana. You can also join the defence via the following link: https://us02web.zoom.us/j/84030403260?pwd=MXlMcmpqU0hPdXptcG5FSU84dEEwdz09 (Meeting ID: 840 3040 3260, Passcode: 062449).

Short summary:

Sputtering is a process where atoms are ejected from a solid by collision with energetic ions. It is an essential process in many technological areas and analytical techniques. The influence of different parameters on the sputtering process was investigated using SRIM simulations, Sigmund and Thompson analytical models and experiments.

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